PAPER REFERENCE NUMBER : D-XIII.3 A multifunctional laser linking and cutting structure for microelectronic circuits
نویسندگان
چکیده
A novel laser-switch has been developed that unites a vertical link structure and a fuse in a vertical arrangement. The structure has been designed and fabricated in a standard three-level metal CMOS process and has been successfully verified. The area of the proposed linking and cutting structure is 20% lower compared to a combination of conventional laser-link and fuse, and the processing time is reduced by up to 50%. The formed laser-links show a very low resistance (Rmedian= 1.7 Ω). Both linking and cutting structures were processed with 100% yield.
منابع مشابه
A Multifunctional Laser Linking and Cutting Structure for Standard 0.25 mum CMOS-Technology
A novel laser-switch has been developed, designed and manufactured in a standard 6 level metal CMOS process. The redimensioned laser-switches combine a laser link and via (fuse) corresponding to minimum design rules in a single device. Due to vertical arrangement of the linking and the cutting structure (via), an area reduction of more than 30% is achieved, compared to laser arrays utilizing tr...
متن کاملStudy of Certified Reference Material Preparation Technique for Microelectronic Digital Circuits
− This paper introduces an alternative method to traditional certified reference material (CRM) preparation technique for microelectronic digital circuits. Instead of selfmanufacturing chips, a novel preparation technique is introduced which selects matured samples as the CRMs, these samples are also called certified reference samples (CRSs). The use of CRS not only greatly reduces the difficul...
متن کاملFactor XIII deficiency: a review of literature
Coagulaon factor XIII gene, protein structure and funcon Coagulaon factor XIII (FXIII) is a tetrameric (FXIII- A2B2) pro-transglutaminase enzyme with an essenal role in the final stage of coagulaon cascade by cross linking the fibrin monomers and stabilizing the fibrin clot. Congenital FXIII deficiency is a rare bleeding disorder, with an autosomal recessive trait inheritance, and a fre...
متن کاملIntroducing New Structures for D-Type Latch and Flip-Flop in Quantum-Dot Cellular Automata Technology and its Use in Phase-Frequency Detector, Frequency Divider and Counter Circuits
Quantum-dot cellular automata (QCA) technology is an alternative to overcoming the constraints of CMOS technology. In this paper, a new structure for D-type latch is presented in QCA technology with set and reset terminals. The proposed structure, despite having the set and reset terminals, has only 35 quantum cells, a delay equal to half a cycle of clocks and an occupied area of 39204 nm2. T...
متن کاملThe Effect of Power and Maximum Cutting Speed on the Material Removal Rate and Cutting Volume Efficiency in CO2 Laser Cutting of Polycarbonate Sheets
In the laser cutting process some well-known parameters, e.g. laser power and cutting speed, play major roles in the performance of the process. Each parameter or a combination of parameters can affect the material removal volume and cutting volume efficiency. The purpose of this research is to study the effect of power and maximum cutting speed on the material removal rate (MRR) and cutting vo...
متن کامل